Abstract: Aiming at the integrated processing method of measurement and processing of complex surfaces on special-shaped radomes, there is a problem that the measuring rod and the workpiece are prone to interference when measuring complex surfaces, which makes CNC programming difficult, and a complex surface measurement path planning method is proposed. This method discretizes the machine tool measurement system into point cloud data, simulates the position relationship between the measuring rod and the workpiece during CNC measurement through the spatial coordinate transformation of the point cloud, and introduces the octree algorithm to add topological relationship to the point cloud, and detects whether interference occurs between the measuring rod point cloud and the workpiece point cloud. Finally, the measurement system information in the non-interferometric state is output as G-code, and the trajectory simulation is carried out through Vericut software and applied to reverse engineering. In this paper, 8 504 measurement points are planned for measurement paths, and the results show that the measurement paths can avoid interference positions and make effective measurements. The collision detection algorithm can accurately realize the measurement path planning of complex surfaces under the premise of meeting the measurement requirements, and provide theoretical guidance for the measurement methods of complex surfaces.