Research on thermal deformation of ultra-precision machine tools with effect on motion accuracy
-
摘要: 超大口径超精密机床研制是大口径光学元件加工的必要基础，超大口径超精密机床在大行程、长工作周期的加工过程中，由于导轨发热引起的机床热形变将严重影响运动部件的直线度与光学元件的加工精度。利用ANSYS Workbench软件进行热-结构耦合仿真，对所设计的龙门式大口径磨削机床、5轴柔性气囊抛光机床进行了热形变分析，得到了导轨生热对机床整体热形变的影响规律。针对现有的磨削、抛光机床进行温度-直线度监测实验，探究了热形变对磨削机床所用液体静压导轨与抛光机床所用直线导轨运动直线度的影响规律，实际测量结果表明机床液体静压导轨的油膜生热对导轨运动直线度有较大影响。Abstract: Large-diameter optical component processing is based on the development of super large-diameter ultra-precision machine tools. For super large diameter ultra-precision machine tools, in the process of large stroke and long working time, the machine’s thermal deformation caused by the guide rail's heat will seriously restrict the straightness of the moving parts and the processing accuracy of the optical components. In this paper, thermal-structural coupling simulation is performed by using ANSYS Workbench software to analyze the thermal deformation of the designed gantry-type grinding machine of large diameter and 5-axis flexible airbag polishing machine, the influence of the heat generated from the guide rail is obtained on the overall thermal deformation of the machine. Temperature-straightness monitoring experiments were conducted on existing grinding and polishing machines to investigate the effect of thermal deformation on the straightness of liquid hydrostatic guideways for grinding machines and linear guideways for polishing machines. In practice, the measurement results show a significant impact on the straightness of the rail movement generated by the oil film heat of the machine tool’s liquid hydrostatic guide.
-
表 1 横梁静力学仿真结果
滑块编号 正压力/N 动摩擦系数 1 3677.7 0.005 2 1897.9 0.006 3 3847.7 0.005 4 4572.5 0.005 5 1868.9 0.006 6 4546.5 0.005 
下载: 导出CSV
-
[1] 郭隐彪, 彭云峰, 王振忠, 等. 大口径光学元件的精密磨抛与检测装备开发及应用[J]. 航空制造技术, 2018, 61(6): 26-35. doi: 10.16080/j.issn1671-833x.2018.06.026 [2] 郭隐彪, 杨炜, 王振忠, 等. 大口径光学元件超精密加工技术与应用[J]. 机械工程学报, 2013, 49(19): 171-178. [3] 梁迎春, 陈国达, 孙雅洲, 等. 超精密机床研究现状与展望[J]. 哈尔滨工业大学学报, 2014, 46(5): 28-39. doi: 10.11918/j.issn.0367-6234.2014.05.006 [4] 金滩, 李平, 肖航, 等. 大中型光学元件高效精密磨削技术研究综述[J]. 机械工程学报, 2016, 52(9): 165-175. [5] Pileri D. Large optics fabrication: technology drivers and new manufacturing techniques[J]. Eastman Kodak Company (United States), 1989, 1168: 25-32. [6] 张双虎. 探索大口径光学元件加工的“中国方案”[N]. 中国科学报, 2021-10-12. [7] 李圣怡. 超精密加工技术成就现代国防[J]. 国防制造技术, 2009(3): 16-21. [8] 张棋, 马积瑞, 范金燕, 等. 对美国国家点火装置2010年以来实验设计思路的分析[J]. 物理学报, 2022, 71(13): 287-298. [9] Cheng B, Bradley P A, Finnegan S M, et al. Fundamental factors affecting thermonuclear ignition[J]. Nuclear Fusion, 2021, 61(9). [10] Thomas C A, Campbell E M, Baker K L, et al. Principal factors in performance of indirect-drive laser fusion experiments[J]. Physics of Plasmas, 2020, 27(11): 112712. doi: 10.1063/5.0019191 [11] Leadbeater P B, Clarke M, Wills-Moren W J, et al. A unique machine for grinding large, off-axis optical components: the OAGM 2500[J]. Precision Engineering, 1989, 11(4): 191-196. doi: 10.1016/0141-6359(89)90028-7 [12] 大口径非球面车磨复合机床研制成功[J]. 工具技术, 2016, 50(11): 6. [13] 杨建国, 张宏韬, 童恒超, 等. 数控机床热误差实时补偿应用[J]. 上海交通大学学报, 2005(9): 1389-1392. doi: 10.3321/j.issn:1006-2467.2005.09.001 [14] 毕超, 陈正茂, 张立斌, 等. 液体静压导轨的热变形及改善措施分析[J]. 制造技术与机床, 2017(11): 56-64. doi: 10.19287/j.cnki.1005-2402.2017.11.010 [15] 马术文. 数控机床热变形特性和热误差补偿研究[D]. 成都: 西南交通大学, 2007. [16] 翟少剑. 机床整机温度场建模及其动态特性分析[D]. 北京: 北京工业大学, 2011. [17] 刘国顺, 林宪旗, 张文亮, 等. 基于ANSYS的直线导轨热变形分析[J]. 机床与液压, 2019, 47(7): 160-163. doi: 10.3969/j.issn.1001-3881.2019.07.037 [18] 杨淇帆. 基于有限元方法的机床主轴箱热特性分析[D]. 南京: 南京航空航天大学, 2012. [19] 刘世豪. 龙门机床进给系统热—力耦合动态建模分析及优化方法研究[D]. 南京: 南京航空航天大学, 2013. [20] 施晨淳, 王振忠, 彭云峰, 等. PM流量控制器参数对液体静压导轨运动精度影响的研究[J]. 机械工程学报, 2020, 56(1): 157-165. [21] 江云, 侯国安, 孙涛. 液体静压导轨热特性有限元分析[J]. 航空精密制造技术, 2011, 47(5): 23-25. doi: 10.3969/j.issn.1003-5451.2011.05.006 [22] Shi C C, Wang Z Z, Peng Y F. Influence of relative difference between paired guide rails on motion accuracy in closed hydrostatic guideways[J]. Journal of Mechanical Science and Technology, 2020, 34(2): 631-648. doi: 10.1007/s12206-020-0109-4 [23] Chen D J, Wang H, Pan R, et al. An accurate characterization method to tracing the geometric defect of the machined surface for complex five-axis machine tools[J]. The International Journal of Advanced Manufacturing Technology, 2017, 93(9-12): 3395-3408. doi: 10.1007/s00170-017-0718-y -
下载:
点击查看大图
图(11) / 表(1)
计量
- 文章访问数: 196
- HTML全文浏览量: 27
- PDF下载量: 95
- 被引次数: 0
