Abstract: With the development of industrial products in the direction of miniaturization, miniaturization and precision, it is a challenge to the micro-manufacturing technology. Micro-machining method has unique advantages in manufacturing micro-parts with high precision and complex shape compared with traditional micro-manufacturing technology such as micro-electromechanical system. Mechanical micro-drilling technology is an important part of micro-machining method and is widely used in various industrial fields. It is necessary to study a series of theories and technologies of micro-drilling technology because the tool size effect. This paper introduces the development of micro-drilling technology from the aspects of micro-drill bit geometry, micro-drill grinding, micro-drilling mechanism, micro-drilling lubrication, micro-drill coating technology, and provides a reference for further research of micro-drilling technology.