Abstract: Fast tool servo (FTS) system can accurately and efficiently manufacture the elements with complex surfaces or microstructures, and the machining errors will produce because of the influence of motion inertia and control signal delay. According to the amplitude-frequency and phase-frequency characteristics of FTS transfer function, a lead compensator is designed by using the method of anticipatory iterative learning control. The influence of amplitude attenuation and response delay is controlled, and the accurate output of tool displacement is realized by planning the lead step and the lead gain. In the machining experiment of two-dimensional sinusoidal array whose wavelength is 70 μm, the measuring result indicates that the actual surface is consistent with the designed shape, the deviation is within 0.12 μm in peak-to-valley value, and the expected requirement is satisfied.