Abstract: In actual production, a good facility layout can improve production efficiency while reducing production costs and is therefore of great significance. In this paper, the machine model is improved by heat dissipation and maintenance in the manufacturing process of semiconductors and other products. The NSGA-Ⅱ algorithm is used to solve two targets: the transportation cost and site area of a closed-loop layout. First, we add the minimum clearance and the additional clearance of two clearances in the machine model to simulate the actual production required by the machine for heat dissipation and machine maintenance clearance. Second, according to the characteristics of two problems in the closed-loop layout that must be solved to determine the sequence and precise position of the machines, the placement rule and coding form of the NSGA-Ⅱ algorithm in the closed-loop layout are determined. Finally, the problem of machine layout with different scales is solved, and a Pareto solution with a good distribution is obtained. The experimental results are compared with the double-row layout. The experimental results show that the NSGA-Ⅱ algorithm can be used to devise an improved closed-loop layout of the machine model, and the closed-loop layout has a higher area utilization rate than the double-row layout.