精密超精密主轴转台套类零件高精高效磨削工艺

High-precision and high-efficiency grinding technology for sleeve parts of precision and ultra-precision spindle and rotary table

  • 摘要: 套类零件是精密超精密主轴、转台关键共性零件之一,其精度是影响主轴和转台部件性能的重要因素。分析了精密超精密主轴、转台套类零件结构特征、技术特性、加工难点,以及基于卧式内、外圆磨削加工中所存在的问题;设计了基于立式磨削的加工工艺技术路线,实现最小工序转运及基准转换误差累积;对基于立式磨削工艺中工件装卡、前序质量控制、工艺参数选择与优化等关键问题进行了论述;基于立式磨削工艺技术路线,完成了大量典型高精度套类零件磨削,稳定实现了磨削圆度≤1 μm、同轴度≤2 μm和垂直度≤2 μm磨削效果,精密超精密主轴、转台套类零件磨削精度及磨削效率得到有效提升。

     

    Abstract: Sleeve parts are the key common parts of precision and ultra-precision spindle and rotary table, and their accuracy is an important factor affecting the performance of spindle and rotary table. This paper analyzes the structure characteristics, technical characteristics, machining difficulties of sleeve parts of precision and ultra-precision spindle and rotary table, as well as the problems existing in horizontal internal and external cylindrical grinding. The processing technology route based on vertical grinding is designed to realize the minimum process transfer error and the accumulation of datum conversion error. The key issues in vertical grinding process, such as workpiece clamping, pre-order quality control, process parameter selection and optimization are discussed. Based on the vertical grinding technology, a number of typical high-precision sleeve parts have been grinded, As the measurement results shown, the grinding roundness, coaxiality and perpendicularity are better than 1 μm, 2 μm and 2 μm, respectively. And the grinding accuracy and efficiency of these parts have been greatly improved.

     

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