Abstract: Aiming at the problem of gas film fluctuations during the operation of the air floating table, the effects of different air cavity structure shapes of air static pressure bearings on the cyclone and gas film fluctuations in the air film is studied. By combining performance parameters such as bearing capacity and stiffness, the results offinite element simulation of different shapes of air cavities are compared and analyzed. It is found that the rectangular air cavity has the largest stiffness, but the cyclone phenomenon is serious. The circular table air cavity can effectively suppress the cyclone phenomenon. These analyses restrain the cyclones and the fluctuation of the air film of the aerostatic bearing from the structural parameters of the bearing, and provide the theoretical basis for improving the stability and machining accuracy of the air flotation table.