Abstract: Aiming at the difficulty of traditional PID control in adapting to the influences of various nonlinear disturbances in ultra-precision machining, this paper compares the influence of PID parameters on the step response of SPDT guideway through MATLAB/Simulink simulation, and purposes a fuzzy PID universe optimization method, and develops an optimized fuzzy controller named exponential distribution universe fuzzy PID controller for the control of the guideway. Compared with the traditional PID controller with fixed parameters, the simulation results show that the exponential distribution domain fuzzy PID controller makes the system response speed faster, showing a better control effect.