超精密锥形液体静压转台节流器孔径和轴承间隙对其刚度影响的研究

Effect of orifice diameter and bearing clearance on stiffness of ultra-precision conical hydrostatic rotary table

  • 摘要: 液体静压转台因为其高刚度、高精度等优良性能在超精密机床中得到了广泛应用,其节流器孔径和轴承间隙参数的选择是其性能提升的关键因素。为了进一步研究两种参数对转台刚度的影响,设计了一种可以改变这些参数的小孔节流锥形液体静压转台,使用流体仿真的方法对其刚度进行计算研究并开展了验证实验。首先,介绍了锥形液体静压转台的结构形式,并对转台的性能进行了理论计算和分析;接着,在Fluent软件中仿真计算并总结了节流器孔径和轴承间隙对液体静压转台刚度的影响规律;最后,制备了液体静压转台实物,测量了其轴向和径向刚度,与仿真计算得到的结果在变化趋势上具有良好的一致性,证明了仿真模型的可靠性,对于液体静压转台的设计与刚度提升具有重要意义。

     

    Abstract: Hydrostatic rotary table has been widely used in ultra-precision machine tools because of its excellent performance of high stiffness and high precision, which can be improved by selecting parameters of orifice diameter and bearing clearance. In order to further study the influence of the two parameters, an orifice compensated conical hydrostatic rotary table with orifice diameter and bearing clearance can be changed was designed. The stiffness of the rotary table was calculated by using fluid simulation method and validation experiments were then carried out. Firstly, the structure of conical hydrostatic rotary table was introduced, and the performance of it was theoretically calculated and analyzed. Then, the influence of orifice diameter and bearing clearance on the stiffness of hydrostatic rotary table was simulated and summarized in Fluent software. Finally, the rotary table was produced, and its axial and radial stiffness were measured, which were in good agreement with the simulation results, the reliability of the simulation model was proved. It is of great significance to the design and stiffness improvement of hydrostatic rotary table.

     

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