Abstract: Nickel base alloy is widely used in aviation turbine engine because of its excellent physical properties. Many precision parts of aviation turbine engine need to be processed with micro drill. When drilling nickel base alloy, the material work hardening phenomenon is serious, resulting in increased machining difficulty, serious tool wear and affecting the drilling quality. This paper analyzes the difficulties faced by nickel base alloy micro hole drilling, summarizes and discusses the micro drilling mechanism from the aspects of chip formation mechanism, drilling force and torque, drilling heat and drilling temperature, analyzes the wear form, influencing factors and wear mechanism of the bit, and discusses the factors affecting the hole processing quality such as burr, white layer, roundness, from the aspects of tool geometry, tool material some measures to improve the hole processing quality are put forward from the aspects of auxiliary drilling methods.