Abstract: This article discusses the optimization and compensation of RTCP following error detection based on μ1000/5ST-400V five-axis vertical precision machine tool. A mathematical model of position error is established, under which sufficient conditions for transforming the rotational coordinates into mechanical coordinates are derived under the homogeneous transformation. By optimizing the algorithm, the position error is transformed into the spatial error. The control system updates the gain coefficient in the iterative position error, improves the detection accuracy of the spatial error of the machine tool, and improves the accuracy of the machine tool through compensation. Finally, the test adopts S specimen cutting, and the cutting results are tested, which proves the feasibility of the scheme.