Abstract: Linear motor is a typical direct drive system with high speed, high precision, and large thrust, which can be applied to high precision linear motor occasions in sophisticated equipment. However, the “zero transmission” property of linear motor motion system makes the disturbance factors including load variation and nonlinear friction force and so on, can act on the motion systems. It implies that disturbances can affect the performance and kinematic accuracy of systems. In this paper, the mode of linear motor motion systems with closed loop controllers is given and input-to-state stability analysis of the mode is considered. Based on the Lyapunov function method, an input-to-state stability criterion of linear motor motion systems can be obtained. The relationship between the controller gains and input-to-state stability is provided, which can provide auxiliary support for the selection of controller gains.