Abstract: Mastering the tool wear mechanism is the key to the stable preparation of large area gratings. Aluminum film with layered structure determined by plating process is the first choice of film blank for machine gratings. In order to obtain the rule of the effect of the middle layer aluminum film on the wear of diamond cutting tools during the grating mechanical marking process, the mechanical properties of the layer aluminum film and the rule of tool marking wear were tested for the first time. The hardness and elastic modulus of the layer aluminum film were measured by the nanoindentation experiment, which were 0.48 GPa and 65.2 GPa respectively, meeting the Hall-Petch strengthening theory. Therefore, Deform 3D finite element analysis software was used for the first time to establish a layered layered aluminum film model, and the engraving depth was set at the aluminum film layer interface. It was found that the layered film interface had a significant effect on its stress transfer after the engraving depth of 2 μm and 4 μm for single-layer and 4-layer aluminum films. The barrier effect of the interface on stress transfer disappears; The tool wear pattern and wear position are roughly the same when cutting single and 4 layers of aluminum film, but the tool wear is small when cutting 4 layers of aluminum film, which is consistent with the results of subsequent machine cutting test.