Abstract: The identification and compensation of machine tool geometric errors can improve the machining accuracy. With the development of on-machine measurement, the identification of geometric errors by artefact has gradually been applied to the accuracy inspection of machine tools. This paper proposes a method for identifying machine tool yaw errors based on artefact utilizing on-machine measurement. The correctness of the method is verified using a laser interferometer. The effect of installation errors on the identification is analyzed. The uncertainty of yaw error identification is evaluated using the adaptive Monte Carlo method combined with error ellipse model. Then it is verified using the guide to the expression of uncertainty in measurement method. The proposed method can achieve an acceptable level of geometric error identification accuracy. It can be used as an alternative to traditional geometric error identification based on laser interferometric measurement technology and is highly suitable for the periodic inspection of machine tool accuracy to maintain consistent machining quality.