朱范薇, 杨炜, 靳雨豪. 微织构固结磨料抛光轮无水抛光熔融石英光学元件技术研究[J]. 制造技术与机床, 2024, (10): 104-109. DOI: 10.19287/j.mtmt.1005-2402.2024.10.014
引用本文: 朱范薇, 杨炜, 靳雨豪. 微织构固结磨料抛光轮无水抛光熔融石英光学元件技术研究[J]. 制造技术与机床, 2024, (10): 104-109. DOI: 10.19287/j.mtmt.1005-2402.2024.10.014
ZHU Fanwei, YANG Wei, JIN Yuhao. Research on anhydrous polishing technology of fused silica using microtexture wheels[J]. Manufacturing Technology & Machine Tool, 2024, (10): 104-109. DOI: 10.19287/j.mtmt.1005-2402.2024.10.014
Citation: ZHU Fanwei, YANG Wei, JIN Yuhao. Research on anhydrous polishing technology of fused silica using microtexture wheels[J]. Manufacturing Technology & Machine Tool, 2024, (10): 104-109. DOI: 10.19287/j.mtmt.1005-2402.2024.10.014

微织构固结磨料抛光轮无水抛光熔融石英光学元件技术研究

Research on anhydrous polishing technology of fused silica using microtexture wheels

  • 摘要: 抛光是精密光学元件制造的最后一道冷加工工序,当前采用的游离磨料抛光技术蕴含的不可控因素较多,且会在元件表面产生水合层并存在磨料浪费等问题。为了实现可控绿色抛光并确保光学元件达到所需的表面质量要求,固结磨料无水抛光技术以其独特的优势开始得到推广。然而,固结磨料抛光轮在加工时磨损剧烈,耐用性和散热性有所欠缺。因此,在抛光轮上构建螺旋形微织构图案,以压力、转速比、微织构纹理的曲率和条数作为影响因素设计了正交试验,得到了最佳抛光工艺参数。实验表明,与无织构普通抛光轮相比,螺旋形微织构抛光轮能够显著提高砂轮磨损性能,并且在加工过程中能够保证熔融石英元件材料去除率和表面粗糙度收敛。

     

    Abstract: The final cold step in the production of precision optical components is polishing. The free abrasive polishing technology used currently has a lot of unpredictable variables, which results in a hydrated layer on the component’s surface in addition to abrasive waste and other issues. Because of its special benefits, fixed abrasive polishing technology in an anhydrous environment has been extensively utilized to provide controlled green polishing and guarantee that the optical components fulfill the necessary surface quality standards. Nevertheless, fixed abrasive polishing wheels suffer from significant processing wear, poor durability, and poor heat dissipation. To determine the ideal polishing process parameters, a spiral microtexture pattern is created on the polishing wheel. Then, orthogonal experiments are designed, taking into account the pressure, rotational speed ratio, curvature, and number of microtexture strips. According to the research, a spiral microtexture polishing wheel may assure a convergence of surface roughness and fused silica material removal rate during processing by considerably enhancing the wheel’s wear performance when compared to a regular polishing wheel.

     

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