Abstract:
Laser processing has many advantages such as high precision, flexibility, universality, and pollution-free, which have great potential for surface texturing and micro-hole processing. In order to further improve the efficiency and quality of laser processing, this study designed a novel focused ultrasonic assisted laser processing device, which realized the synchronous and efficient focusing of conventional nanosecond laser and ultrasonic wave, and improved the efficiency and universality of focused ultrasonic assisted laser processing technology. Experimental results show that the optimized ultrasonic-assisted laser processing device markedly improves the ultrasonic focusing effect, achieving a maximum sound pressure at the focus that is 1.75 times greater than that of the focused ultrasonic transducer, thereby significantly enhancing both the efficiency and precision of microhole fabrication in silicon carbide ceramics.