Abstract: Thermal error is an important factor affecting the machining accuracy and stability of precision computer numerical control (CNC) machine tools. Electric spindles, ball screws, and supporting components are the core basic components of machine tools, and their thermal errors have a significant impact on the machining accuracy of precision CNC machine tools. To further study the theory and technology of thermal error control of machine tool basic components, the current research status of thermal error control of machine tools was systematically analyzed from the perspectives of common technology and individual technology. Common technologies mainly include anti-deformation technology, temperature measurement point optimization, thermal error compensation, and optimization of cooling medium parameters. The thermal error control strategies of electric spindle, ball screw and support parts are reviewed respectively from two aspects of mechanical structure design and active cooling structure. Finally, the research prospects of thermal error control in precision CNC machine tools were proposed, providing reference and guidance for the research and engineering application of thermal error control in precision CNC machine tools.