Abstract:
To enhance the driving control accuracy of the macro-motion part of the macro-micro composite actuator, based on the electromagnetic force driving principle, the dynamic model of the macro-motion part was established. An linear quadratic regulator (LQR) controller and a three-closed-loop PID controller were designed respectively. Through numerical simulation and experimental methods, the superiority of the LQR controller was verified. The experimental results show that the positioning error is about 1 μm under the control of LQR algorithm and about 9 μm under the control of three-closed-loop PID algorithm when the no-load and a positioning stroke is 10 mm. When the load is 1 kg and the positioning stroke is 10 mm, the positioning error under LQR algorithm control is about 1 μm,while the positioning error under three-closed-loop PID algorithm control is about 3.2 μm. The research results show that the LQR algorithm has higher positioning accuracy, smaller overshoot, stronger stability, and better robustness compared to the three closed-loop PID algorithms, and can better meet the macro-motion control requirements of the macro-micro composite actuator.