超精密主轴各向工作刚度测试方法研究与装置研制

Research on measuring method and development of test device for working stiffness of ultra-precision spindle in all directions

  • 摘要: 超精密主轴的工作刚度是其性能重要参考指标。为解决目前超精密主轴工作刚度测试中非接触式加载测量装置普遍存在的施加载荷大小难以准确控制、位移测量方式不够准确等问题,提出了一种基于位移法实现的超精密主轴工作刚度测试方法。首先,介绍了该方法测试主轴工作刚度的原理;其次,设计了一种基于该原理实现的主轴工作刚度测试装置,该装置采用非接触式的加载和测量技术,能够在主轴旋转状态下实现加载载荷的精确稳定控制,并通过多个高精度位移传感器实现对主轴位移的精确测量。最后,实验结果表明,该装置多次测试重复性误差小于5%,测试结果具有较高的可靠性,能够满足超精密主轴刚度测试需求。

     

    Abstract: Working stiffness is an important reference index for the performance of ultra-precision spindles. In order to solve the problems that the applied load is difficult to control accurately and the displacement measurement method is not accurate, which are common in non-contact loading measuring devices for ultra-precision spindle working stiffness testing, a new working stiffness measurement method based on the displacement method was studied. Firstly, the paper introduces the principle of the method for measuring the working stiffness of the spindle, and then proposes a spindle working stiffness measuring device based on the principle. Secondly, the device adopts non-contact loading and measurement, which can realize the accurate and stable control of the loading load under the rotating state of the spindle, and realizes the accurate measurement of the spindle displacement through multiple high-precision displacement sensors. Finally, the experimental verification of the device's testing performance showed that the device's repeated error was less than 5%, and the test results had high reliability, which could meet the requirements for testing the stiffness of ultra-precision spindles.

     

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