Abstract: To address the fatigue resistance and wear resistance requirements of aviation gears, this study investigates the surface integrity of grinding processes. Focusing on a representative difficult-to-machine material 16Cr3NiWMoVNbE carburized aviation gears, orthogonal grinding experiments were designed to analyze key parameters affecting surface roughness and residual stress. Multi-objective process optimization was achieved through grey relational analysis. The results showed that radial feed dominates surface roughness variation. Residual compressive stress distribution follows tooth pitch ≈ tooth tip > tooth root, with feed rate significantly affecting tooth tip and tooth pitch stress while linear speed and radial feed govern root stress. Entropy-weighted grey relational analysis revealed radial feed exerts the greatest comprehensive influence on surface integrity. The optimal parameter combination balancing low roughness and high compressive stress was determined as: maximum linear speed 24 m/s, feed speed 1 000 mm/min, and radial feed 0.007 mm.