基于PMAC数控系统采集的超精密机床导轨快速圆轨迹偏差的在线评估

Online evaluation of rapid circular trajectory deviations of ultra-precision machine tool guideways based on PMAC CNC system acquisition

  • 摘要: 针对超精密机床加工复杂曲面光学元件时的动态轨迹精度检测需求,提出一种基于高性能可编程多轴控制器(power programmable multi-axis controller,Power PMAC)的光栅位置信号直接采集方法。通过数控系统原生数据接口实时记录X/Z轴光栅坐标,实现圆轨迹偏差的在线评估。相较于传统球杆仪或激光干涉仪,该方法无需外部传感器,避免了在机床外部架设设备。试验结果表明,在进给速度为100 mm/min的圆弧插补测试中,圆轨迹偏差3σ为±5.5 nm(置信度99.1%),其中X轴偏差3σ为±4.1 nm(置信度98.7%),Z轴偏差3σ为±3.7 nm(置信度98.2%)。该方法为超精密机床的自由曲面加工工艺优化、动态误差机理研究及实时补偿提供了高效、低成本的检测方案,同时为比较不同超精密机床的性能提供了性能可视化保障,为未来的超精密机床的数字孪生提供了数据支撑。

     

    Abstract: To address dynamic trajectory accuracy requirements in ultra-precision machining of complex optical surfaces, a direct grating position signal acquisition method is developed using a power PMAC (programmable multi-axis controller). real-time recording of X/Z-axis grating coordinates is implemented through the NC system's native data interface, enabling on-machine evaluation of circular trajectory deviations. Compared with conventional ball-bar tests or laser interferometry, this approach eliminates the need for external sensors and avoids on-machine hardware installations. Experimental results demonstrate that during circular interpolation at a feed rate of 100 mm/min, the total trajectory deviation is quantified 3σ as ±5.5 nm (99.1% confidence), with X-axis and Z-axis deviations 3σ of ±4.1 nm (98.7% confidence) and ±3.7 nm (98.2% confidence) respectively. This method provides an efficient, low-cost detection solution for optimizing freeform surface machining processes, investigating dynamic error mechanisms, and implementing real-time compensation in ultra-precision machining, while offering performance visualization for cross-machine comparison and supplying foundational data for digital twin implementation.

     

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