基于内置自反馈节流的高精度静压支承单元静动态特性研究

Study on static and dynamic characteristics of high-precision hydrostatic unit based on built-in self-feedback throttling

  • 摘要: 针对中大型精密、超精密设备要求高刚、高精和高阻尼的问题,对静压支承单元典型应用的液体静压转台展开性能研究。首先,基于内置自反馈静压单元工作原理,绘制液阻模型,结合零位工况特点,设计油腔结构尺寸;其次,通过建立动力学模型,着重分析节流岛边宽c对转台静动态特性影响,并依此确定c值范围,同时研究角速度ω对转台性能影响;最后,通过模型仿真,分析对比不同边宽、不同角速度下的转台特性。结果表明,根据零位工况设计油腔尺寸(不包括c值)的方法是可靠的,动态模型是有效可行的;c值优选下油腔径向宽度值1/5左右(c=9.5 mm),转台性能较好,仿真刚度11 512 N/μm,理论频宽195 rad/s,远低于轴向固有频率,具有极高的稳定性和鲁棒性;运行时根据载荷调节速度,提高静压单元服役性。

     

    Abstract: To meet the high stiffness, high precision, and high damping requirements of medium to large precision and ultra precision equipment, a performance study was conducted on the typical application of hydrostatic units in liquid hydrostatic turntables. Firstly, based on the working principle of the built-in self-feedback hydrostatic unit, a hydraulic resistance model was developed, and the structural dimensions of the oil cavity were designed in combination with the characteristics of the zero-load condition. Secondly, by establishing a dynamic model, the influence of the throttling island side width c on the static and dynamic characteristics of the turntable was analyzed, and the range of c values was determined accordingly. At the same time, the influence of angular velocity ω on the performance of the turntable was studied. Finally, the characteristics of the turntable were analyzed and compared through simulation under different side widths and angular velocities. The results indicate that the method of designing oil cavity dimensions (excluding the c value) based on beginning conditions is reliable, and the dynamic model is effective and feasible. The optimal value of c is about 1/5 of the radial width of the oil cavity (c=9.5 mm), at which the turntable achieves the best performance, with a simulated stiffness of 11 512 N/μm and a theoretical bandwidth of 195 rad/s, which is far lower than the axial natural frequency. It's got super high stability and robustness. During operation, the speed can be adjusted according to the load to improve the serviceability of the hydrostatic unit.

     

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