Abstract: Machine tool accuracy analysis is a multi-objective optimization problem. Factors such as spatial motion accuracy, manufacturing cost, and reliability are of concern. Balancing multiple objectives is the difficulty of accuracy analysis. A multi-objective allocation method based on linear transformation is proposed. Using the linear transformation equation, the dimensional standardization of the single-objective optimization model is achieved. Taking the planar rapid polishing machine tool as an example, accuracy analysis is carried out. Firstly, through multi-body theory analysis, the spatial accuracy model and 22 motion errors of the planar rapid polishing machine tool for dressing are established. Through sensitivity analysis, 5 sensitive errors are proposed. Secondly, using linear positive and negative transformation equations, the single-objective optimization models for spatial accuracy, manufacturing cost, and reliability are standardized. Using 3 weight coefficients, the multi-objective optimization function of the planar rapid polishing machine tool is constructed, and the parameters of the function are solved through intelligent algorithms, and machine tool design indicators are proposed. Finally, accuracy allocation results were verified through experiments, and the 1200 mm diameter metal polishing pad of the planar rapid polishing machine was conditioned, achieving a surface profile accuracy better than 0.02 mm.