大型液体静压回转工作台静态热误差机理与温度特性研究

Study on the static thermal error mechanism and temperature characteristics of large-scale hydrostatic rotary table

  • 摘要: 针对温度场非均匀分布引发的热误差严重制约转台性能的进一步提高,且现有的研究因缺乏对静态热误差机理及内部温度场的深入剖析,导致动态分析难以区分热源主导效应与运动耦合效应、热误差补偿不足的问题,提出理论分析与多测点温度场监测结合的研究方法,首次系统揭示了静态工况下转台内部“回油面>芯轴>导轨”的温度分层及“近回油口高-远回油口低”的周向温度特性;基于周期性修正模型实现对温度演变过程的高精度拟合,拟合决定系数>0.9995;同时,通过浮起量测试验证了静态工况下油膜刚度对热变形的鲁棒性,浮起量维持在±1 μm内波动。研究成果填补了静态热误差系统性研究的不足,为精密回转工作台动态热行为分析提供了实验数据与理论支撑。

     

    Abstract: Regarding the issue that thermal errors caused by non-uniform temperature field distribution severely restrict the further improvement of rotary table performance, and existing studies, due to the lack of in-depth analysis of static thermal error mechanisms and internal temperature fields, result in difficulties in distinguishing between heat source-dominant effects and motion coupling effects in dynamic analysis as well as insufficient thermal error compensation, a research method combining theoretical analysis and multi-measurement-point temperature field monitoring is proposed. This method systematically reveals, for the first time, the temperature stratification of "oil return surface > spindle > guide rail" inside the rotary table under static working conditions, as well as the circumferential temperature characteristics of "high temperature near the oil return port and low temperature far from the oil return port". A high-precision fitting of the temperature evolution process is realized based on a periodic correction model, with the fitting determination coefficient > 0.9995. Meanwhile, the floating amount test verifies the robustness of oil film stiffness against thermal deformation under static conditions, with the floating amount maintained within ±1μm. The research results fill the gap in the systematic study of static thermal errors and provide experimental data and theoretical support for the dynamic thermal behavior analysis of precision rotary worktables.

     

/

返回文章
返回