Abstract: Aiming at the ultra-precise manufacturing problems of optical freeform surfaces or surface microstructures, a large-stroke fast tool servo system was developed. The system employs voice coil motor (VCM) as the driving element and utilizes an air-bearing guide for support and guidance. Finite element analysis was conducted to simulate and analyze the static and modal characteristics of the mover. The servo system was built according to the performance specifications required by the system and the mathematical model of the plant was identified through frequency response testing and least-squares fitting. Subsequently, the control system was modeled in combination with the mathematical model and the PID parameters were tuned and optimized. Experimental results demonstrate that the proposed FTS system achieves a maximum stroke exceeding 6 mm and maintains a motion range greater than 100 μm at 200 Hz, exhibiting excellent dynamic response and control performance.