Abstract: Addressing the challenges of the unclear tool-tip path evolution under the coupled influence of ultrasonic vibration and path parameters, as well as the insufficiently elucidated impact of surface texturing on the dynamic performance of face gears, Relative position between tool tip and workpiece within a single elliptical vibration cycle was analyzed and constraint conditions for minimum residual height in the cutting direction were determined. A method for regulating cutter contact point distribution was proposed to ensure consistent separation between tool tip and workpiece. Optimal zone for micro-texture implementation on face gear tooth surface was identified through loaded tooth contact analysis. The influence of tooth surface micro-texture on the time-varying mesh stiffness of face gear drives was calculated and comparatively analyzed using the finite element method. Building upon this, a dynamic model of the face gear system that incorporates the effects of micro-textures was developed. Finally, the vibrational response of the micro-textured face gear is successfully obtained and analyzed.