Abstract: A comprehensive modeling and analytical investigation was conducted on the precision control and tooth surface formation mechanism of face gears machined. Based on the forming principles of face gear hobbing and the kinematic characteristics of the six-axis CNC system, the surface and meshing equations were derived. A modification design method was proposed to restrict the occurrence of singular points on the surface, thereby improving the machining accuracy. Furthermore, a comparative analysis method between the machined and theoretical surfaces was developed to investigate the variations in profile morphology under different machining errors. The results show that the machined error introduced along the radial direction and the angle, which should be strictly controlled during assembly and operation.