中大口径光学元件超精密磨削机床研究现状

Research status of ultra-precision grinding machines tools for medium-to-large aperture optical components

  • 摘要: 随着空天观测、激光核聚变和极紫外光刻等关键领域高端光学元件制造需求的不断增长,我国缺乏可产业化应用的中大口径超精密光学磨削机床等装备瓶颈问题日益凸显。围绕整机结构设计、关键功能部件及工艺技术保障等方面对中大口径光学元件超精密磨削机床研究现状进行了系统分析,重点讨论了高静动态特性机床结构、静压支承技术、砂轮修整以及在位测量等关键技术的研究进展,阐述了国内该领域研究存在的问题与应对措施,展望了中大口径光学元件超精密磨床的未来发展趋势。

     

    Abstract: With the growing demand for manufacturing high-end optical components in critical fields such as aerospace observation, laser fusion, and extreme ultraviolet lithography, the lack of industrialized applications of medium-to-large aperture ultra-precision optical grinding machines in China has become a significant bottleneck. The research status of ultra-precision grinding machines for medium-to-large aperture optical components is systematically reviewed, focusing on three core aspects, namely whole-machine structural design, key functional components, and process technology assurance. Key advancements in critical technologies are highlighted, including machine structures with high static and dynamic performance, hydrostatic bearing technology, grinding wheel truing and dressing, and on-machine measurement. Existing challenges in domestic research are identified, and countermeasures are proposed. The future development trends for medium-to-large aperture ultra-precision optical grinding machines are also discussed.

     

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