基于贝叶斯信息量与模态分解的单晶硅磨削加工接触状态监测研究

Study on contact state monitoring in monocrystalline silicon grinding process based on Bayesian information criterion and empirical mode decomposition

  • 摘要: 单晶硅作为一种典型的硬脆难加工材料,其磨削过程中砂轮-工件接触时刻的精准判定直接影响加工质量与效率。针对接触状态高精度监测需求,提出一种基于经验模态分解(empirical mode decomposition, EMD)与贝叶斯信息量(Bayesian information criterion, BIC)斜率的创新检测策略,该策略通过对声发射(acoustic emission, AE)信号的分析,可实现对接触状态的高精度监测。相较于传统阈值法、基于AE信号的多种统计特征值法,BIC特征对接触事件的响应灵敏度显著优于均方根、方差等常规特征;所提出的EMD-BIC斜率法可实现0.002~0.5 ms的早期检测优势,较阈值法和统计特征法具有更优的时效性,分别提前了0.05~0.5 ms和0.002~0.4 ms。通过融合信号时频特性与统计推断,有效提升了接触判断的准确率和时效性,相关成果为单晶硅超精密磨削过程的实时监测与高性能制造提供了可靠的技术支撑。

     

    Abstract: Monocrystalline silicon, as a typical hard and brittle difficult-to-machine material, requires precise detection of wheel-workpiece contact during grinding to ensure machining quality and efficiency. To address the demand for high-precision monitoring of contact states, an innovative monitoring approach based on empirical mode decomposition (EMD) and Bayesian information criterion (BIC) slope for high-precision contact-state identification using acoustic emission (AE) signals is proposed. Compared with conventional amplitude threshold methods and multiple AE statistical feature-based approaches, the BIC feature demonstrates superior sensitivity to contact events, outperforming conventional metrics such as RMS and variance. The proposed EMD-BIC slope method achieves early detection within 0.002−0.5 ms, showing significant temporal advantages over threshold-based methods (0.05−0.5 ms earlier) and statistical feature methods (0.002−0.4 ms earlier). By integrating time-frequency analysis with statistical inference, this method significantly improves both the accuracy and timeliness of contact detection. The findings provide a reliable technical solution for real-time monitoring and high-performance manufacturing in ultraprecision silicon grinding processes.

     

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