气浮转台轴套内圆超精密磨削工艺研究

Study on ultra-precision internal cylindrical grinding process of bushing for air-bearing turntable

  • 摘要: 针对气浮转台轴套内圆磨削过程中存在形状公差控制不足的难题,分析圆柱度误差成因,提出了多工艺参数协同控制策略。利用自研超精密气浮磨床与在位测量系统,开展5因素4水平正交试验与Box-Behnken响应面试验,系统研究了砂轮转速、工件转速、进给深度、往复速度和循环次数对轴套内孔圆柱度的影响。结果表明,砂轮转速对圆柱度影响最为显著,其次为工件转速与循环次数。通过建立并验证多元二次响应面回归模型,优化得到最佳工艺参数组合,砂轮转速3 000 r/min、工件转速200 r/min、进给深度2 μm、往复速度0.75 mm/s、循环次数4次。经试验验证,该参数下圆柱度可达0.96 μm,表面粗糙度降至0.411 μm。

     

    Abstract: Aiming at the challenge of insufficient control over form tolerances during the internal cylindrical grinding of bushings for air-bearing turntables, the causes of cylindricity errors is investigated and a collaborative control strategy involving multiple process parameters is proposed. Utilizing a self-developed ultra-precision air-bearing grinding machine equipped with an in-situ measurement system, a five-factor, four-level orthogonal design and Box-Behnken response surface tests-were conducted to systematically examine the effects of grinding wheel speed, workpiece speed, feed depth, reciprocating speed, and cycle count on the internal bore cylindrical error of the bushing. The results indicate that grinding wheel speed has the most significant impact on cylindrical error, followed by workpiece speed and cycle count. By establishing and validating a multivariate quadratic response surface regression model, an optimized set of process parameters was derived, namely grinding wheel speed of 3 000 r/min, workpiece speed of 200 r/min, feed depth of 2 μm, reciprocating speed of 0.75 mm/s, and cycle count of 4. Experimental verification confirmed that under these parameters, a cylindrical error of 0.96 μm and a surface roughness of 0.411 μm could be achieved.

     

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