微孔节流型高速空气静压电主轴静动态特性研究

Static and dynamic characteristics of a high-speed aerostatic motorized spindle with micro-orifice throttling

  • 摘要: 空气静压主轴在精密、超精密领域有着广泛应用。为了提高高速电主轴在超精密加工中的支承刚度与运行稳定性,针对节流孔直径小于0.1 mm且无均压腔的微孔节流型空气静压电主轴,建立了基于COMSOL的径向轴承模型和气膜-转子耦合模型。揭示了气膜厚度、节流孔直径及供气压力参数对承载力和刚度的耦合影响规律并通过实验进行验证。在此基础上,进一步分析了不同转速下主轴的轴心运动轨迹,确定了系统稳定运行的转速范围。结果表明,微孔节流孔径和气膜厚度对径向轴承静态性能影响显著,且存在最优匹配组合,当目标轴节流孔直径为0.05 mm,气膜厚度为12 μm时,承载力与刚度达到最优匹配;转速不超过8 000 r/min时,气膜系统依然保持较好的稳定性。研究结果可为微孔节流型高速空气静压电主轴的设计优化与性能提升提供理论参考和工程依据。

     

    Abstract: Aerostatic spindles are widely employed in precision and ultra-precision machining. To enhance the support stiffness and operational stability of high-speed motorized spindles in ultra-precision applications, a radial bearing model and a coupled gas film-rotor model were developed in COMSOL Multiphysics for a micro-orifice-throttled aerostatic motorized spindle featuring orifice diameters smaller than 0.1 mm and no recessed pressure-equalizing cavities. The coupled effects of gas film thickness, orifice diameter, and supply pressure on load capacity and static stiffness were systematically investigated and experimentally validated. Building on this, the shaft-center trajectories at various rotational speeds were further analyzed to determine the stable operating speed range of the system. The results show that both orifice diameter and gas film thickness significantly influence the static characteristics of the radial bearing, and an optimal parameter combination exists. When the orifice diameter of the target spindle is 0.05 mm and the gas film thickness is 12 µm, load capacity and stiffness achieve their optimal balance. The gas film system maintains good stability at speeds up to 8 000 r/min. These findings provide a theoretical reference and engineering basis for the design optimization and performance enhancement of micro-orifice-throttled high-speed aerostatic motorized spindles.

     

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