Abstract: Increased operating speeds in five-axis CNC machine tools lead to greater servo errors. However, current detection devices are limited to measuring accuracy at low speeds, which are significantly below actual machining speeds. To overcome this limitation, the parameters influencing servo errors were modeled and analyzed, and a novel high-speed servo error detection device was designed. The device employs orthogonal compliant hinge structures for coaxiality calibration, incorporates modular design to extend rod length ranges, and integrates high-frequency laser displacement sensing for high-resolution measurement. Experimental results demonstrate that the device achieves sub-micron calibration accuracy and micron-level measurement precision under high-speed conditions of 4 000 mm/min, representing a 5–10 fold improvement in measurement speed compared to existing equipment. This provides reliable technical support for dynamic accuracy evaluation of five-axis CNC machine tools under high-speed conditions.