Abstract: To address the current bottlenecks such as low efficiency and poor structural repeatability in nano-scratching processing, a dedicated experimental platform integrating a micro-force servo tool holder was constructed for the manufacturing of sub-micron-scale structures. Structured cutting tools with sinusoidal contour features were selected, and grinding experiments under constant normal load and variable load modes were carried out. The relationship between normal load and actual scratching depth was explored, and the influence of different loading strategies on material removal behavior was compared and analyzed. Based on these results, large-area three-dimensional sinusoidal sub-micron structure arrays were fabricated. The process was further extended to curved surface machining, and precise fabrication of three-dimensional sinusoidal groove structures on microsphere surfaces was achieved. The results provide a new technical solution for efficient fabrication of three-dimensional nanostructures.