基于KalmanNet-LSTM的精密光栅位移测量系统信号处理方法研究

KalmanNet-LSTM-based signal processing for precision grating displacement measurement systems

  • 摘要: 光栅位移信号处理是超精密机床等高端加工检测装备实现高精度运动控制的关键环节。针对工程场景中光栅正余弦观测链路存在相位偏置、正交误差以及噪声统计随工况变化而呈现不确定性的问题,提出了一种结合长短期记忆网络(long short-term memory, LSTM)与卡尔曼滤波框架(Kalman filter, KF)的改进神经网络辅助卡尔曼滤波(KalmanNet-LSTM)方法。该方法通过数据驱动学习时变增益调节规律,并将光栅正余弦相位相关特征与创新量等统计信息构造作为网络输入,以增强对时序相关扰动与工况变化的建模能力。实验结果表明,在通用运动与自动化控制器(universal motion and automation controller,UMAC)平台实测中,KalmanNet-LSTM的位移误差均方根(root mean square, RMS)误差为0.418 nm,相较于传统卡尔曼滤波降低82.1%。与电容位移传感器真值对比显示,典型运动片段下的均方根误差约为0.378~0.421 nm。研究结果表明,KalmanNet-LSTM在存在相位偏置等结构性误差及噪声统计随工况变化的条件下,具有更强的鲁棒性与估计稳定性,有效提高了超精密机床反馈系统的性能。

     

    Abstract: Grating-based displacement signal processing is a key enabler of high-accuracy motion in ultra-precision machine tools and other high-end manufacturing and metrology equipment. In engineering applications, the sine/cosine observation chain of grating encoders often suffers from phase bias, quadrature (orthogonality) errors, and noise with uncertain statistics that vary with operating conditions. To address these issues, an improved neural-network-aided Kalman filtering method, termed KalmanNet-LSTM, was proposed by integrating a long short-term memory (LSTM) network into the (Kalman filter,KF) . In this method, the regulation rule for the time-varying Kalman gain was learned through a data-driven approach. Phase-related features extracted from the grating sine/cosine signals, together with statistical information such as innovation, were constructed as network inputs to enhance the modeling capability for temporally correlated disturbances and varying operating conditions. Experimental results on a UMAC-based platform demonstrate that KalmanNet-LSTM achieves a root mean square (RMS) displacement error of 0.418 nm, representing an 82.1% reduction compared with the conventional Kalman filter. Furthermore, when validated against a capacitive displacement sensor as ground truth, the RMS error over representative motion segments ranges from approximately 0.378 nm to 0.421 nm. These results demonstrate that KalmanNet-LSTM provides improved robustness and estimation stability under structural measurement-chain errors and condition-dependent noise uncertainty, thereby enhancing the performance of ultra-precision motion feedback systems.

     

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