基于物理信息神经网络的直驱双转台热误差预测

Thermal error prediction of a direct-drive dual-axis rotary table based on physics-informed neural network

  • 摘要: 针对直驱双转台热误差预测中温度测点冗余、热响应滞后及跨工况预测稳定性不足的问题,提出一种基于物理信息神经网络(physics-informed neural network,PINN)的直驱双转台热误差预测方法。采用球杆仪和多通道温度采集系统获取不同工况下的功能参考点热漂移与温度响应数据,通过时滞交叉相关分析和聚类分析筛选代表温度测点,并构建融合初值约束、热惯性动态约束和准稳态约束的热误差预测模型。结果表明,所提模型在主要热误差方向上具有较好预测效果,Y向和Z向热误差预测的RMSE分别为0.15 μm和0.10 μm,优于多元线性回归、支持向量回归和多层感知机模型。稀疏样本试验表明,当训练样本比例降低至5%时,模型仍保持较稳定的预测性能。该方法可为直驱双转台热误差建模与补偿提供参考。

     

    Abstract: To address the problems of redundant temperature measuring points, thermal response lag, and insufficient prediction stability under cross-condition scenarios in thermal error prediction of direct-drive dual-axis rotary tables, a thermal error prediction method for the functional reference point based on a physics-informed neural network was proposed. Thermal drift data and temperature response data under different operating conditions were obtained using a ballbar and a multi-channel temperature acquisition system. Representative temperature measuring points were selected through time-lag cross-correlation analysis and clustering analysis. A thermal error prediction model was then constructed by incorporating initial-condition constraints, thermal inertia-dynamic constraints, and quasi-steady-state constraints. The results showed that the proposed model achieved good prediction performance in the main thermal drift directions. The RMSE values of thermal error prediction in the Y and Z directions were 0.15 μm and 0.10 μm, respectively. The proposed model outperformed multiple linear regression, support vector regression, and multilayer perceptron models. Sparse-sample experiments showed that the model still maintained stable prediction performance when the training sample ratio was reduced to 5%. The proposed method provides a reference for thermal error modeling and compensation of direct-drive dual-axis rotary tables.

     

/

返回文章
返回