Abstract: Internal gear power honing is a key finishing process that can improve tooth surface quality and enhance gear accuracy. A kinematic model is established for an internal gear power honing machine tool. Based on the homogeneous coordinate transformation theory and the Denavit-Hartenberg method, the kinematic transformation matrices of each linear and rotary axis are derived. Considering the structural deformation of the machine tool during machining, the influence of unit static load on machine tool deformation is analyzed, and an error model is established to reflect the mapping from the deformation of machine tool components to the tool tip offset. The gear honing process under different feed modes is simulated by introducing tool offset errors, and the tooth surface deviations are analyzed. The results show that the minimum total tooth trace deviation of the simulated machined tooth surface is 3.76 μm, and the minimum total tooth trace deviation of the machine tool experiment is 1.7 μm. The comparison results of different feed modes show that the trends of the simulation data are consistent with the machine tool experimental data, thereby verifying the effectiveness and rationality of the established kinematic model and error model of the machine tool.