基于薄膜节流器的闭式液体静压导轨直线度预测分析

Prediction and analysis of straightness of closed hydrostatic guideway based on thin film restrictor

  • 摘要: 为精准预测闭式液体静压导轨直线度,揭示误差传递与油膜特性的耦合机制,提出一种基于薄膜节流器的直线度预测方法。通过结构分析明确7组零件、11个结合面的误差传递路径,识别6个油膜结合面为关键误差源。采用傅里叶级数拟合导轨表面直线度数据,基于等效刚体假设建立竖直方向力与力矩平衡方程,将油膜等效为线性弹簧模型,结合油腔压力、油垫承载力及刚度计算,求解油膜反力与平均油膜厚度,构建精度预测模型。实验结果表明,导轨关键零件表面直线度控制在1 μm以下后,根据测量表面数据拟合表面形貌,预测导轨竖直方向直线度误差为0.12 μm/300 mm,与实测结果近似且趋势基本一致,对导轨装配及关键零件表面精度设计具有一定指导意义。

     

    Abstract: To accurately predict the straightness of a closed hydrostatic guideway and reveal the coupling mechanism between error transmission and oil film characteristics, a straightness prediction method based on a thin film restrictor is proposed. Through structural analysis, the error transmission paths of 7 sets of parts and 11 joint surfaces are identified, and 6 oil film joint surfaces are identified as key error sources. The straightness data of the guideway surface is fitted by Fourier series. Based on the equivalent rigid body assumption, the balance equation of vertical force and moment is established. The oil film is equivalent to a linear spring model. Combined with the calculation of oil cavity pressure, oil pad bearing capacity and stiffness, the oil film reaction force and average oil film thickness are solved to construct the accuracy prediction model. The experimental results show that after the surface straightness of the key parts of the guideway is controlled below 1 μm, the surface morphology is fitted based on the measured surface data, and the predicted vertical straightness error of the guideway is 0.12 μm/300 mm, which is similar to the measured results and has a basically consistent trend. This has certain guiding significance for the assembly of the guideway and the design of the surface accuracy of key parts.

     

/

返回文章
返回