Abstract: Fast tool servo (FTS) is one of mechanical methods used in optical components with complex surfaces. In this paper, a FTS system which is drived by piezoelectric ceramic(PZT) and transferred by flexuer hinges is developed. The testing results show that the positioning errors are less than 4 nm, the repetitive positioning error is less than 4 nm, the max travel is 50 nm and the frequency response precedes 150 Hz at 20 μm; A good foundation for future use was built in optical components with complex surfaces.