Spatial error modeling and sensitivity analysis of ultra-precision micro-compound turn-milling machine tool
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摘要: 微小型车铣复合加工机床可实现一次装夹完成大部分零件加工工序，是微小型复杂结构件加工必不可少的数控设备，作为精密加工数控设备，其自身的空间几何误差直接影响零件的加工精度。以北京理工大学自主研发的超精密微小型车铣复合加工机床CXKG25-I为研究对象，首先开展超精密车铣复合机床空间几何误差元素分析，获得机床的57项空间几何误差，并基于多体系统理论方法建立超精密车铣复合加工机床的空间几何误差模型。然后开展了空间几何误差因素的灵敏度分析，并揭示了影响机床加工误差的关键敏感因素，其分析结果指导和优化超精密车铣复合加工机床结构设计与制造。Abstract: The micro-compound turn-milling machine tool can complete most parts processing processes in one clamping process. It is an indispensable CNC equipment for processing micro complex structural parts. As a precision machining CNC equipment, its own spatial geometric error directly affects the machining accuracy of parts. The ultra-precision micro-compound turn-milling machine tool CXKG25-I developed by Beijing Institute of Technology was used as the research object in this paper. First, the spatial geometric error elements of the ultra-precision turn-milling compound machine tool were analyzed, and the 57 spatial geometric errors were obtained. The spatial geometric error model was established based on the multi-body system theory method. Then, the sensitivity analysis of the spatial geometric error project was carried out, and the key sensitive factors of machining errors were revealed. These analysis results guide and optimize the structural design and manufacturing of ultra-precision turn-milling machine tool.
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表 1 超精密加工机床的几何误差元素
移动轴 运动误差 垂直度误差 X 轴 $ {\delta }_{x}\left(x\right) $, $ {\delta }_{y}\left(x\right) $, ${\delta }_{{\textit{z}}}\left(x\right)$, ${\varepsilon }_{x}\left(x\right)$, $ {\varepsilon }_{y}\left(x\right) $, ${\varepsilon }_{{\textit{z}}}\left(x\right)$ $ {\gamma }_{xy} $ Y 轴 $ {\delta }_{x}\left(y\right) $, $ {\delta }_{y}\left(y\right) $, ${\delta }_{{\textit{z}}}\left(y\right)$, $ {\varepsilon }_{x}\left(y\right) $, $ {\varepsilon }_{y}\left(y\right) $, ${\varepsilon }_{{\textit{z}}}\left(y\right)$ ${\gamma }_{y{\textit{z}}}$ Z 轴 ${\delta }_{x}\left({\textit{z}}\right)$, ${\delta }_{y}\left({\textit{z}}\right)$, ${\delta }_{{\textit{z}}}\left({\textit{z}}\right)$, ${\varepsilon }_{x}\left({\textit{z}}\right)$, ${\varepsilon }_{y}\left({\textit{z}}\right)$, ${\varepsilon }_{{\textit{z}}}\left({\textit{z} }\right)$ ${\gamma }_{x{\textit{z}}}$ B 轴 $ {\delta }_{x}\left(\beta \right) $, $ {\delta }_{y}\left(\beta \right) $, ${\delta }_{{\textit{z}}}\left(\beta \right)$, $ {\varepsilon }_{x}\left(\beta \right) $, $ {\varepsilon }_{y}\left(\beta \right) $, ${\varepsilon }_{{\textit{z}}}\left(\beta \right)$ $ {\gamma }_{xb} $, ${\gamma }_{{\textit{z}}b}$, $ {\gamma }_{ub} $, $ {\gamma }_{wb} $ C 轴 $ {\delta }_{x}\left(c\right) $, $ {\delta }_{y}\left(c\right) $, ${\delta }_{{\textit{z}}}\left(c\right)$, $ {\varepsilon }_{x}\left(c\right) $, $ {\varepsilon }_{y}\left(c\right) $, ${\varepsilon }_{{\textit{z}}}\left(c\right)$ $ {\gamma }_{cx} $, $ {\gamma }_{cy} $, $ {\gamma }_{cu} $ U 轴 $ {\delta }_{x}\left(u\right) $, $ {\delta }_{y}\left(u\right) $, ${\delta }_{{\textit{z}}}\left(u\right)$, $ {\varepsilon }_{x}\left(u\right) $, $ {\varepsilon }_{y}\left(u\right) $, ${\varepsilon }_{{\textit{z}}}\left(u\right)$ $ {\gamma }_{uy} $, $ {\gamma }_{uw} $, ${\gamma }_{u{\textit{z}}}$ W 轴 $ {\delta }_{x}\left(w\right) $, $ {\delta }_{y}\left(w\right) $, ${\delta }_{{\textit{z}}}\left(w\right)$, $ {\varepsilon }_{x}\left(w\right) $, $ {\varepsilon }_{y}\left(w\right) $, ${\varepsilon }_{{\textit{z}}}\left(w\right)$ $ {\gamma }_{wx} $, $ {\gamma }_{wy} $ 
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表 3 超精密车铣复合加工机床各种间初始参考位置
位置参数 数值/mm $ {{p}_{0x},p}_{1x} $,$ {p}_{2x} $,$ {p}_{3x} $,$ {p}_{4x} $,$ {p}_{5x} $,$ {p}_{6x} $,$ {p}_{7x} $,$ {p}_{8x} $ 481, –335.5, 0, 0, 0, 0, 0, 0, 0 $ {p}_{0y},{p}_{1y} $,$ {p}_{2y} $,$ {p}_{3y} $,$ {p}_{4y} $,$ {p}_{5y} $,$ {p}_{6y} $,$ {p}_{7y} $,$ {p}_{8y} $ –92.995, 518, 0, 0, 0, 0, –184.901, 0, –309 ${p}_{0{\textit{z}}},{p}_{1{\textit{z}}}$,${p}_{2{\textit{z}}}$,${p}_{3{\textit{z}}}$,${p}_{4{\textit{z}}}$,${p}_{5{\textit{z}}}$,${p}_{6{\textit{z}}}$,${p}_{7{\textit{z}}}$,${p}_{8{\textit{z}}}$ –629.002, 164.0028, 0, 0,
286, 0, 0, 0, 0
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