Research on vibration characteristics of plug-in machine driven by linear motor
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摘要: 针对由直线电机引起的机械振动影响异形插件机精度的问题，对异形插件机的振动特性进行研究，并根据振动特性进行结构优化。首先对异形插件机上的直线电机进行推力和频率测试；其次对异形插件机的整机模型进行模态分析，根据模态分析结果对零部件进行结构优化，提升异形插件机的低阶固有频率；然后对优化后的整机模型进行谐响应分析，计算出取样点的振幅-频率响应数据；最后利用视觉相机对异形插件机进行重复定位精度测试实验。结果表明，优化后的异形插件机的前六阶固有频率有不同程度的提升，采样点在0～50 Hz的直线电机激励下，振动位移在0.03 mm左右。实验测试重复定位精度稳定在±0.03 mm内，验证了结构优化的有效性和仿真结果的可靠性。Abstract: Aiming at the problem that the mechanical vibration caused by the linear motor affects the accuracy of the special-shaped plug-in machine, the vibration characteristics of the special-shaped plug-in machine were studied, and the structure was optimized according to the vibration characteristics. Firstly, the thrust and frequency tests of the linear motor on the special-shaped plug-in machine were carried out. Secondly, the modal analysis of the whole machine model of the special-shaped plug-in machine was carried out, and the structural optimization of the parts was carried out according to the modal analysis results, so as to improve the low-order natural frequency of the special-shaped plug-in machine. Then, the harmonic response analysis of the optimized whole machine model was carried out, and the amplitude-frequency response data of the sampling point is calculated. Finally, the vision camera was used to test the repeatability of the special-shaped plug-in machine. The results show that the first six natural frequencies of the optimized special-shaped plug-in machine have different degrees of improvement, and the vibration displacement of the sampling point was about 0.03 mm under the excitation of the linear motor of 0~50 Hz. The experimental test was that the repeatability of positioning was stable within ±0.03 mm, which verifies the effectiveness of structural optimization and the reliability of simulation results.
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表 1 优化前整机固有频率与振型描述
Hz 阶数 固有频率 主要振型描述 1 52.28 底座沿Z方向摆动，横梁扭转，插件头位置振型变化较大 2 75.12 横梁跟随大理石梁绕对称轴在X-Z平面转动，横梁末端振型变化较大 3 76.80 支撑梁沿Z方向摆动，支撑梁振型变化较大 4 98.86 横梁沿X方向摆动，横梁末端振型变化较大 5 105.47 整机绕中轴线在X-Z平面摆动，横梁末端振型变化较大 6 109.60 横梁扭转，插件头位置变化较大 
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表 2 优化前后的整机固有频率对比表
Hz 阶数 1 2 3 4 5 6 优化前 52.28 75.12 76.80 98.86 105.47 109.60 优化后 68.01 86.26 96.24 108.08 119.76 124.60
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