Software development of measuring and controlling system for the rotation error of nano aerostatic bearing

Based on the research of the tester applied to test the rotation error of nano aerostatic bearing, a software development of measuring and controlling system for the rotation error of nano aerostatic bearing is introduced in this paper. The software of the measurement and control system has been programmed mixed with C++ and MATLAB, which can realize the functions of motion control, data acquisition, data processing and result display. At the same time, an angle error control method is designed to reduce the angle error introduced in the process of data acquisition, so as to obtain a more accurate spindle rotation error. The program debugging result shows that, the software capability of the test system is rational, and is satisfied the testing accuracy and qualification of the spindle rotation error, the sampling angle error can be controlled within ± 0.01°, and the relative error between the roundness error of reference artefact(test ball) and the nominal value (36nm) is less than 6%.