Study on the micro vibration of viscous and inertial coupling aerostatic bearings

Because of the simple structure and high stiffness,the orifice-restrictor air bearings are widely used in ultra-precision machining. However, increasing the roughness of ultra-precision surface is limited due to the micro-vibration in the orifice aerostatic bearings. In order to suppress the micro vibration, a novel viscous and inertial restrictor aerostatic bearing is designed in this paper. By employing the CFD method,the influences of the structure parameters on the stability of the novel aerostatic bearing are studied carefully. And the experimental test-beds are designed to test the bearing performances. The results show that the viscous and inertial restrictor aerostatic bearings can reduce the micro vibration compared with orifice air bearings efficiently. Meanwhile, increasing the permeability of porous materials, increasing the orifice diameter, and reducing the height of the pressure equalizing chamber can also reduce the micro vibration of the viscous and inertial restrictor aerostatic bearings.